Nadal, who beat Federer in the Monte Carlo final last year, beat Philipp Kohlschreiber 6-2, 6-3. Federer defeated David Ferrer 6-4, 6-0.

"I am very happy to have done it here," Federer said. "That is a lot of games. I'm glad they are victories."

The 10-time Grand Slam champion has never lost a set to Ferrer in six matches.

"I am a bit surprised, because he is a very good player," Federer said. "To beat him 6-4, 6-0 is really phenomenal."

In Saturday's semifinals, the top-ranked Federer will play two-time champion Juan Carlos Ferrero, who beat Richard Gasquet of France 5-7, 7-5, 6-2. The second-seeded Nadal will play Tomas Berdych of the Czech Republic in the semifinals.

Federer's first career win came against Guillaume Roux of France in September 1998 at an indoor tournament in Toulouse, France.

"I remember he was coming back from a Davis Cup tie in Israel and was tired," Federer said. "I took him down. The first few questions came right away. 'What are you going to do with your first prize money?' Put it in the Swiss bank, that was my answer."

With the win, Federer's earnings are more than $30 million.

"Two incredible numbers," Federer said. "I've come a long way."

Nadal needed five match points to defeat Kohlschreiber. The German qualifier took a set off Nadal in the second round of the Australian Open.

Berdych won 12 straight games after trailing 3-0 in the second set to beat Robin Soderling of Sweden 5-7, 6-3, 6-0.

"The start wasn't so good today, but then things changed," the 10th-seeded Czech said. "I'm really happy that I can sit here and try to prepare for tomorrow's semifinals."

Berdych attacked Soderling's serve and outmaneuvered his taller opponent with accurate ground strokes.

Ferrero was in trouble while trailing 4-2 in the second set, but he was able to overturn the deficit.